DocumentCode :
3461292
Title :
Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking
Author :
Canonica, Michael ; Noell, Wilfried ; de Rooij, Nico ; Zamkotsian, Frederic ; Lanzoni, Patrick
Author_Institution :
Ecole Polytech. Fed. de Lausanne, Neuchâtel, Switzerland
fYear :
2011
fDate :
8-11 Aug. 2011
Firstpage :
131
Lastpage :
132
Abstract :
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.
Keywords :
astronomical spectra; micromechanical devices; micromirrors; spectroscopy; addressable MEMS slit mask; astronomical spectroscopy; micromirrors; multi-object spectroscopy; multi-wafer stacking; wafer-level bonding; Arrays; Bonding; Hysteresis; Micromirrors; Surface roughness; Surface treatment; MEMS; MOEMS; cryogenic application; large array; micromirror; multi-object spectroscopy; programmable slit mask;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
ISSN :
2160-5033
Print_ISBN :
978-1-4577-0334-8
Type :
conf
DOI :
10.1109/OMEMS.2011.6031047
Filename :
6031047
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3461292
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