• DocumentCode
    3461292
  • Title

    Addressable MEMS slit mask for multi-object spectroscopy based on multi-wafer stacking

  • Author

    Canonica, Michael ; Noell, Wilfried ; de Rooij, Nico ; Zamkotsian, Frederic ; Lanzoni, Patrick

  • Author_Institution
    Ecole Polytech. Fed. de Lausanne, Neuchâtel, Switzerland
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    131
  • Lastpage
    132
  • Abstract
    MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated using multiple wafer-level bonding and implemented with individual addressing of each element.
  • Keywords
    astronomical spectra; micromechanical devices; micromirrors; spectroscopy; addressable MEMS slit mask; astronomical spectroscopy; micromirrors; multi-object spectroscopy; multi-wafer stacking; wafer-level bonding; Arrays; Bonding; Hysteresis; Micromirrors; Surface roughness; Surface treatment; MEMS; MOEMS; cryogenic application; large array; micromirror; multi-object spectroscopy; programmable slit mask;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031047
  • Filename
    6031047
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461292