Title :
3-D MEMS scanning system for dual-axis confocal microendoscopy
Author :
Jae-Woong Jeong ; Mandella, M.J. ; Kino, G.S. ; Contag, C.H. ; Solgaard, Olav
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
This paper describes a 3-D MEMS scanning system for 3.2mm-diameter dual-axis confocal (DAC) microendoscopes. Co-operation of a 2-D lateral scanner and a 1-D depth scanner enables fast 3-D microscopy over a volume that measures 340μm by 236μm by 286μm.
Keywords :
bioMEMS; endoscopes; optical microscopy; optical scanners; 3D MEMS scanning system; 3D microscopy; DAC microendoscopes; dual-axis confocal microendoscopy; Micromechanical devices; Microscopy; Mirrors; Optical device fabrication; Optical imaging; Relays; 3-D imaging; depth scanner; dual-axis confocal microscopy; micromirror; vertical combdrive actuator;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031050
