Title :
Microscanner with vertical out of plane combdrive
Author :
Sandner, Thilo ; Jung, D. ; Kallweit, D. ; Grasshoff, Thomas ; Schenk, Harald
Author_Institution :
Fraunhofer IPMS Dresden, Dresden, Germany
Abstract :
This paper reports a new concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical combs are realized from a planar scanner substrate by a functionalized wafer bonding process The new device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the process flow. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4mm mirror diameter and 8° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.
Keywords :
microactuators; micromirrors; optical scanners; wafer bonding; 2D raster scanning; SVGA resolution; beam steering; linearized scanning; mechanical tilt angle; microscanner; planar scanner substrate; quasi-static 1D-scanners; quasi-static microscanning mirrors; size 4 mm; static deflections; vertical out-of-plane combdrive; wafer bonding; Automatic voltage control; Electrodes; Mirrors; Resonant frequency; Static VAr compensators; Three dimensional displays; Voltage measurement; laser projection; linearized raster scanning; micro scanning mirror; quasistatic actuation; vertical combdrive;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031051
