Title :
MEMS rotary stage with linear stiffness
Author :
Baran, Utku ; Davis, W.O. ; Holmstrom, Sture ; Brown, Dean ; Sharma, Jaibir ; Gokce, S.K. ; Urey, Hakan
Author_Institution :
Koc Univ., Istanbul, Turkey
Abstract :
A comb-actuated rotary MEMS stage with a novel spring structure to achieve linear spring stiffness is presented. The present stages can at resonance rotate ±7deg. and ±4.5deg at vacuum and ambient pressure, respectively.
Keywords :
elastic constants; micro-optomechanical devices; optical arrays; MEMS rotary stage; comb-actuated rotary; linear spring stiffness; spring structure; Fabrication; Finite element methods; Linearity; Micromechanical devices; Mirrors; Resonant frequency; Springs; Comb Drive; Linear MEMS Scanner; Low-frequency Scanning;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031053
