Title :
Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
Author :
Cheo, Kelvin K. L. ; Guangya Zhou ; Yu Du ; Fook Siong Chau
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A built-in angular sensing mechanism unique to the vibratory grating scanner is demonstrated through utilizing the zeroth-order beam, of which the intensity variation is affected by the angular position of the grating platform. With the first-order diffracted beam used for optical scanning, the stationary zeroth-order beam can be used for angular position sensing.
Keywords :
angular measurement; diffraction gratings; optical scanners; optical sensors; angular position; first-order diffracted beam; high-resolution vibratory grating scanner; optical angular position sensing mechanism; optical scanning; stationary zeroth-order beam; zeroth-order beam; Gratings; Laser beams; Measurement by laser beam; Optical device fabrication; Optical feedback; Optical sensors; MEMS; angular position sensing; grating scanners; micromirrors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031055
