Title :
3-Layer-copper microcoils transformed into 3-D cylindrical stator windings for micromotors
Author :
Biefeld, V. ; Springmann, S. ; Lang, Walter
Author_Institution :
IMSAS, Univ. of Bremen, Bremen, Germany
Abstract :
This paper presents the fabrication of a micro motor in order to realize a 2-pole brushless motor with an outer diameter of 4mm. The stator windings are made by microsystem technology and subsequently thermoforming into a cylindrical shape. Key improvements in the fabrication are the add-on of a third copper-layer and the launching of laser cutting technology in combination with a suitable sacrificial layer. Running prototypes of these motors were assembled and characterized.
Keywords :
brushless machines; coils; laser beam cutting; microassembling; microfabrication; micromechanical devices; micromotors; stators; thermoforming; 2-pole brushless motor; 3-layer-copper microcoil; 3D cylindrical stator winding; assembling; cylindrical shape; laser cutting technology; microfabrication; micromotor; microsystem technology; sacrificial layer; size 4 mm; thermoforming; Brushless motors; Coils; Copper; Fabrication; Permanent magnet motors; Shape; Thermoforming; Micro motor; SU-8; cylindrical copper coil; laser ablation; thermoforming;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627167
