DocumentCode
3461479
Title
Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors
Author
Bauer, Ralf ; Brown, G. ; Uttamchandani, Deepak
Author_Institution
Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
187
Lastpage
188
Abstract
Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.
Keywords
electrostatic actuators; frequency response; micro-optomechanical devices; micromirrors; 2D MEMS scanning micromirrors; comb-drive actuators; frameless electrostatic X/Y scanning micromirrors; hysteresis comparison; hysteretic frequency response; Hysteresis; Laser beams; Micromechanical devices; Micromirrors; Q factor; Resonant frequency; Electrostatic MEMS micromirror; frame; hysteresis; resonant 2D scanning;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031056
Filename
6031056
Link To Document