Title :
Hysteresis comparison of framed and frameless electrostatic X/Y scanning micromirrors
Author :
Bauer, Ralf ; Brown, G. ; Uttamchandani, Deepak
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Strathclyde, Glasgow, UK
Abstract :
Dynamic behavior hysteresis of framed and frameless comb-drive actuated 2D MEMS scanning micromirrors is experimentally compared, with a framed micromirror showing reduction or even elimination of the hysteretic frequency response along one of its principal motion axes.
Keywords :
electrostatic actuators; frequency response; micro-optomechanical devices; micromirrors; 2D MEMS scanning micromirrors; comb-drive actuators; frameless electrostatic X/Y scanning micromirrors; hysteresis comparison; hysteretic frequency response; Hysteresis; Laser beams; Micromechanical devices; Micromirrors; Q factor; Resonant frequency; Electrostatic MEMS micromirror; frame; hysteresis; resonant 2D scanning;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031056
