DocumentCode
3461491
Title
RF nano switch based on single crystalline graphene
Author
Li, P. ; Cui, T.
Author_Institution
Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
fYear
2015
fDate
21-25 June 2015
Firstpage
307
Lastpage
310
Abstract
Growth of monolayer single-crystalline graphene using low pressure chemical vapor deposition (LPCVD) method is reported. Radio frequency (RF) nano switches based on coplanar waveguide double-clamped single-crystalline graphene membrane was achieved for the first time. Owing to the single crystalline nature, its life time (> 5000 times) is much longer than polycrystalline graphene (PCG) switches (4-5 times [1]). It exhibits small pull-in voltage (~1 V) and superb signal isolation (c30 dB at 40 GHz) which can be further improved by graphene´s unique electric field effect.
Keywords
CVD coatings; graphene devices; microwave switches; nanoelectromechanical devices; LPCVD method; RF nanoswitch; coplanar waveguide; electric field effect; low pressure chemical vapor deposition; monolayer single crystalline graphene growth; radio frequency nanoswitch; Copper; Films; Grain boundaries; Graphene; Nanoelectromechanical systems; Radio frequency; Switches; Graphene; RF switch; radio frequency; single crystalline;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location
Anchorage, AK
Type
conf
DOI
10.1109/TRANSDUCERS.2015.7180922
Filename
7180922
Link To Document