DocumentCode :
3461513
Title :
VOA-based optical MEMS accelerometer
Author :
Zandi, K. ; Jing Zou ; Wong, Bernard ; Kruzelecky, R.V. ; Peter, Yves-Alain
Author_Institution :
Dept. of Eng. Phys., Ecole Polytech. de Montreal, Montréal, QC, Canada
fYear :
2011
fDate :
8-11 Aug. 2011
Firstpage :
15
Lastpage :
16
Abstract :
A novel in-plane double silicon-on-insulator optical MEMS accelerometer based on variable optical attenuator is presented. It is designed for micro-satellite navigation applications and it uses multimode waveguides integrated with MEMS providing a compact and reliable device.
Keywords :
accelerometers; micro-optics; microsensors; optical attenuators; silicon-on-insulator; micro-satellite navigation; multimode waveguides; silicon-on-insulator optical MEMS accelerometer; variable optical attenuators; Accelerometers; Optical attenuators; Optical fiber sensors; Optical fibers; microelectromechanical systems (MEMS); optical accelerometer; silicon-on-insulator; variable optical attenuator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
ISSN :
2160-5033
Print_ISBN :
978-1-4577-0334-8
Type :
conf
DOI :
10.1109/OMEMS.2011.6031059
Filename :
6031059
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3461513
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