Title :
Flip-up micro scanning mirror with vertical comb drive assembled by simple push operations
Author :
Cheng-An Chen ; Yi Chiu
Author_Institution :
Dept. of Electr. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented.
Keywords :
integrated optics; micro-optomechanical devices; microactuators; micromirrors; optical design techniques; optical fabrication; silicon-on-insulator; SOI substrates; SU8 vertical comb drive actuators; Si; flip-up microscanning mirror; optical design; optical fabrication; push operations; Actuators; Assembly; Integrated optics; Mirrors; Optical device fabrication; Probes; assembly; flip-up; scanning mirror; vertical comb drive;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031061
