Title :
A dual-axis high fill-factor micromirror array for high thermal loads
Author :
Ataman, Caglar ; Lani, S. ; Noell, Wilfried ; Jutzi, F. ; Bayat, D. ; de Rooij, Nico
Author_Institution :
Sensors, Actuators & Microsyst. Lab. (SAMLAB), Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of ±4 degrees.
Keywords :
micro-optomechanical devices; microactuators; micromirrors; optical arrays; optical design techniques; actuator design; dual-axis high fill-factor micromirror array; omnidirectional mechanical DC rotation angle; spring design; thermal load applications; Actuators; Arrays; Electrodes; Micromirrors; Spirals; Springs; beam shaping; electrostatic actuation; micromirror array; thermal load;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031063
