Title :
A high-frequency comb-actuated resonant MEMS scanner for microdisplays
Author :
Gokce, S.K. ; Holmstrom, Sture ; Brown, Dean ; Davis, W.O. ; Urey, Hakan
Author_Institution :
Koc Univ. Istanbul, Istanbul, Turkey
Abstract :
A high-frequency novel torsional MEMS scanner is developed for high resolution microdisplays employing a multi-frame geometry. For the torsional mirror, 26.7° and 36.1° total-optical-scan-angle are achieved at resonance, at atmospheric pressure and vacuum respectively.
Keywords :
micro-optomechanical devices; microdisplays; micromirrors; optical scanners; atmospheric pressure; high resolution microdisplays; high-frequency comb-actuated resonant MEMS scanner; multiframe geometry; torsional mirror; total-optical-scan-angle; Couplings; Damping; Electrostatics; Frequency response; Micromechanical devices; Mirrors; Resonant frequency; MEMS scanner; Torsional scanner; comb drive; display;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031064
