Title :
Fast optical line shaper for ultrashort-pulse laser nanomachining
Author :
Brunne, J. ; Wallrabe, U. ; Treffer, A. ; Bock, M. ; Grunwald, Ruediger
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
In this contribution we present a fast and robust optical line shaping mirror for advanced nanomachining applications with femtosecond lasers. The line shaper consists of two mirror segments and is actuated with a piezoelectric bimorph, which allows for an easy and low-cost fabrication process. Light propagation and pulse transfer have been characterized.
Keywords :
laser beam machining; light propagation; micro-optomechanical devices; micromirrors; nanophotonics; optical fabrication; femtosecond lasers; light propagation; low-cost fabrication; optical line shaper; piezoelectric bimorph; pulse transfer; robust optical line shaping mirror; ultrashort-pulse laser nanomachining; Laser beams; Measurement by laser beam; Mirrors; Nonlinear optics; Optical pulses; Optical sensors; Ultrafast optics; LIPSS; Nanomachining; adaptive biprism; femtosecond laser machining; piezoelectric MOEMS;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031065
