Title :
A process for fabricating robust electrothermal micromirrors with customizable thermal response time and power consumption
Author :
Pal, Shovon ; Xie, Huan
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Florida, Gainesville, FL, USA
Abstract :
A novel process for fabricating robust electrothermal bimorph based MEMS devices is reported and scanning electrothermal micromirrors are fabricated. Device parameters can be chosen to customize thermal response time and power requirements. Aluminum (Al) and Tungsten (W) form the active bimorph layers and polyimide is used for thermal isolation.
Keywords :
aluminium; micro-optomechanical devices; micromirrors; optical fabrication; tungsten; MEMS devices; active bimorph layers; electrothermal bimorph; electrothermal micromirrors; power consumption; thermal isolation; thermal response time; Actuators; Micromirrors; Polyimides; Robustness; Silicon; MEMS; electrothermal; micromirror; robust;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031066
