Title :
A design of high performance gas sensor array with discrete islands of Au catalyst for increasing of zinc oxide nanowire junctions
Author :
Nguyen, Hien ; Quy, C.T. ; Hoa, N.D. ; Hieu, N.V.
Author_Institution :
Dept. Eng. Sci., Uppsala Univ., Uppsala, Sweden
Abstract :
In this study, an effective design for growth of ZnO nanowires directly on gas sensor chips is introduced. The design utilizes the dendrite islands of Au catalyst deposited between and on the Pt electrodes for the nanowires to grow on instead of a continuous seed layer or Au film. This lead to an increase of the nanowire-nanowire junctions in the devices, as well as a reduction of the leak current that would occur through the mentioned alternative seed layer; resulting in a higher sensitivity. The results showed that the developed gas sensors could be used for monitoring of NO2 at low concentration.
Keywords :
II-VI semiconductors; catalysts; gas sensors; leakage currents; nanofabrication; nanosensors; nanowires; semiconductor growth; semiconductor-metal boundaries; sensitivity; sensor arrays; wide band gap semiconductors; zinc compounds; NO2 monitoring; ZnO-Au-Pt; catalyst; dendrite islands; discrete islands; gas sensor chips; high performance gas sensor array design; leak current reduction; nanowire-nanowire junctions; platinum electrodes; sensitivity; zinc oxide nanowire junctions; Gas detectors; Gold; Silicon; Temperature measurement; Temperature sensors; Zinc oxide; Au islands; ZnO nanowires; gas sensors; on-chip growth;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627184