DocumentCode
3461751
Title
Selectively thinned stainless steel scanners through electrical discharge machining
Author
Usta, B.K. ; Gokdel, Yigit Daghan ; Mutlu, Senol ; Yalcinkaya, Arda D.
Author_Institution
Dept. of Electr. & Electron. Eng., Bogazici Univ., Istanbul, Turkey
fYear
2011
fDate
8-11 Aug. 2011
Firstpage
179
Lastpage
180
Abstract
In this work, a simple method using electric discharge machining (EDM) is exploited for three-dimensional fabrication of stainless steel scanners. Wire-EDM is used to define the device contours and sinker-EDM is used to selectively thin parts of the scanner. Fast and slow axis total optical scan angles are measured as 1.6° at 10.875 kHz and 78° at 236 Hz, respectively.
Keywords
electrical discharge machining; optical fabrication; optical scanners; stainless steel; electrical discharge machining; frequency 10.875 kHz; frequency 236 Hz; optical scan angles; selectively thinned stainless steel scanners; sinker-EDM; wire-EDM; Lithography; Machining; Mirrors; Optical device fabrication; Permanent magnets; Steel; Substrates; Electrical discharge machining; optical scanners;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location
Istanbul
ISSN
2160-5033
Print_ISBN
978-1-4577-0334-8
Type
conf
DOI
10.1109/OMEMS.2011.6031070
Filename
6031070
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