Title :
Selectively thinned stainless steel scanners through electrical discharge machining
Author :
Usta, B.K. ; Gokdel, Yigit Daghan ; Mutlu, Senol ; Yalcinkaya, Arda D.
Author_Institution :
Dept. of Electr. & Electron. Eng., Bogazici Univ., Istanbul, Turkey
Abstract :
In this work, a simple method using electric discharge machining (EDM) is exploited for three-dimensional fabrication of stainless steel scanners. Wire-EDM is used to define the device contours and sinker-EDM is used to selectively thin parts of the scanner. Fast and slow axis total optical scan angles are measured as 1.6° at 10.875 kHz and 78° at 236 Hz, respectively.
Keywords :
electrical discharge machining; optical fabrication; optical scanners; stainless steel; electrical discharge machining; frequency 10.875 kHz; frequency 236 Hz; optical scan angles; selectively thinned stainless steel scanners; sinker-EDM; wire-EDM; Lithography; Machining; Mirrors; Optical device fabrication; Permanent magnets; Steel; Substrates; Electrical discharge machining; optical scanners;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031070
