• DocumentCode
    3461789
  • Title

    A high speed MEMS scanner for 140-kHz SS-OCT

  • Author

    Isamoto, K. ; Totsuka ; Suzuki, Takumi ; Sakai, Tadashi ; Morosawa, A. ; Changho Chong ; Fujita, Hideaki ; Toshiyoshi, Hiroshi

  • Author_Institution
    Santec Corp., Komaki, Japan
  • fYear
    2011
  • fDate
    8-11 Aug. 2011
  • Firstpage
    73
  • Lastpage
    74
  • Abstract
    We present an electrostatic vertical comb-drive MEMS optical scanner with the angle magnifier mechanism developed for a 140-kHz wavelength tunable-laser in the swept-source OCT system of a 2 ms/frame visualization capability.
  • Keywords
    bioMEMS; biomedical equipment; laser applications in medicine; optical scanners; optical tomography; SS-OCT; angle magnifier mechanism; electrostatic vertical comb-drive MEMS optical scanner; frequency 140 kHz; high speed MEMS scanner; swept-source OCT system; tunable-laser; visualization capability; Actuators; Biomedical optical imaging; High speed optical techniques; Micromechanical devices; Mirrors; Optical device fabrication; Optical imaging; OCT; electrostatic vertical comb; optical scanner; wavelength tunable laser;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
  • Conference_Location
    Istanbul
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4577-0334-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2011.6031072
  • Filename
    6031072
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3461789