Title :
10 GHz range low loss wide band unidirectional SAW filters using sub-0.1-μm width narrow-gap electrodes
Author :
Odagawa, Hiroyuki ; Tsuji, Takatoshi ; Yamanouchi, Kazuhiko
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
It is very important to develop SHF range SAW devices for high density electrical communication systems. One of the most important terms of SHF range SAW devices is to develop a low loss unidirectional SAW transducer which has high efficiency defined by 1/Q (=G/ωC). Moreover, the ultrasmall fabrication process for less than 0.1 μm electrodes are required. In this paper, SHF range low loss wide band SAW filters using narrow-gap type unidirectional transducers which have high efficiency are investigated. The transducers are constructed by λ/4 electrodes, and the width is about 0.06 μm in 15 GHz range. The results show a 4 dB insertion loss in 5 GHz range and 9 dB in 10 GHz range. Moreover, the frequency response of the 15 GHz range SAW filter is obtained
Keywords :
frequency response; losses; microwave filters; surface acoustic wave filters; 0.06 to 1 micron; 4 to 9 dB; 5 to 15 GHz; Al-LiNbO3; LiNbO3; SAW transducer; SHF range; SPUDT; frequency response; high efficiency; low loss type; narrow-gap electrodes; ultrasmall fabrication process; unidirectional SAW filters; wideband operation; Electrodes; Fabrication; Frequency response; Insertion loss; Oxidation; Piezoelectric films; SAW filters; Surface acoustic wave devices; Transducers; Wideband;
Conference_Titel :
Ultrasonics Symposium, 1996. Proceedings., 1996 IEEE
Conference_Location :
San Antonio, TX
Print_ISBN :
0-7803-3615-1
DOI :
10.1109/ULTSYM.1996.584389
