Title :
Permeable-membrane separating detection of vaporized liquid with nanoparticle-functionalized resonant cantilever for solution-noise suppression
Author :
Haitao Yu ; Pengcheng Xu ; Xinxin Li
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
This paper presents a highly sensitive sensing system for real-time detection of volatile analyte in aqueous solution. Different from immersing the sensor into the analyte solution where resonance Q-factor is very low, our resonant microcantilever sensor detects the vaporized liquid by the aid of a permeable membrane separation technique. The resonant sensor under such in-air operation features high Q-factor for fine resolution. With functionalized mesoporous silica nanoparticles (MSNs) modified onto the cantilever sensor, the sensing system experimentally performs high-sensitive and repeated detection to ammonium.
Keywords :
ammonia; cantilevers; gas sensors; membranes; mesoporous materials; micromechanical devices; nanoparticles; permeability; silicon compounds; NH4; Q-factor; SiO2; ammonium detection; functionalized mesoporous silica nanoparticles; in-air operation; nanoparticle-functionalized resonant cantilever; permeable-membrane separating detection; real-time detection; resonance Q-factor; resonant microcantilever sensor; solution-noise suppression; vaporized liquid; volatile analyte; Cavity resonators; Chemicals; Liquids; Mesoporous materials; Sensors; Silicon compounds; Chemical sensor; mesoporous silica nanoparticles; microcantilever; permeable membrane; vaporized liquid;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627197