Title :
CO2 sensing by work function readout of ZnO based screen printed films
Author :
Pohle, R. ; Tawil, A. ; Mrotzek, C. ; Fleischer, M.
Author_Institution :
Corp. Technol., Siemens AG, Munich, Germany
Abstract :
Work function readout of screenprinted polycrystalline ZnO-based layers is investigated for CO2 detection. Numerous sensing materials have been developed and applied to the GasFET for several target gases like NH3, NO2, CO and humidity [1]. Special emphasis has been placed on the development on sensing layers for CO2 detection [2], but the CO2 sensitive materials identified so far have drawbacks regarding delicate manufacturing, long term stability or need for heated operation. ZnO-based materials may overcome these drawbacks, as the first results shown here will demonstrate.
Keywords :
II-VI semiconductors; carbon compounds; field effect transistors; gas sensors; thick films; wide band gap semiconductors; work function; zinc compounds; CO2; CO2 sensing; ZnO; delicate manufacturing; gasFET; heated operation; long term stability; screen printed films; screenprinted polycrystalline ZnO-based layers; work function readout; Glass; Humidity; Kelvin; Temperature sensors; Zinc oxide; CO2 sensing; Kelvin Probe; work function; zinc oxide;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627201