Title :
Graphene SOI CMOS sensors for detection of PPB levels of NO2 in air
Author :
Gardner, Julian W. ; Cole, M.T. ; De Luca, A. ; Clement, Pierrick ; Llobet, E. ; Ali, Syed Zishan ; Udrea, F.
Author_Institution :
Sch. of Eng., Univ. of Warwick, Coventry, UK
Abstract :
There is considerable demand for sensors that are capable of detecting ultra-low concentrations (sub-PPM) of toxic gases in air. Of particular interest are NO2 and CO that are exhaust products of internal combustion engines. Electrochemical (EC) sensors are widely used to detect these gases and offer the advantages of low power, good selectivity and temporal stability. However, EC sensors are large (~1 cm3), hand-made and thus expensive (~$25). Consequently, they are unsuitable for the low-cost automotive market that demands units for less than $10. One alternative technology is SnO2 or WO3 resistive gas sensors that are fabricated in volume today using screen-printed films on alumina substrates and operate at ~400°C. Unfortunately, they suffer from several disadvantages: power consumption is high ~200 mW; reproducibility of the sensing element is poor; and cross-sensitivity is high.
Keywords :
CMOS integrated circuits; gas sensors; graphene; nitrogen compounds; silicon-on-insulator; C; NO2; PPB level detection; graphene SOI CMOS sensors; ink-jet printed graphene; internal combustion engine exhaust products; toxic gas detection; CMOS integrated circuits; Gas detectors; Gold; Graphene; Heating; Temperature sensors; Graphene; chemical sensor; gas sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627203