Ultra high performance gas sensor based on IC compatible fusion of micromachined hotplatform and nanostructured porous film

Author

Lei Xu ; Zhengfei Dai ; Tie Li ; Guotao Duan ; Weiping Cai ; Yuelin Wang

Author_Institution

State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China

fYear

2013

fDate

16-20 June 2013

Firstpage

2063

Lastpage

2066

Abstract

Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO₂ nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO₂ porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (R_air/R_gas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.

Keywords

colloidal crystals; gas sensors; micromachining; microsensors; monolayers; nanoporous materials; nanosensors; platinum; polymers; semiconductor devices; sensor fusion; thin film sensors; tin compounds; IC compatible fusion; IDE; MHP; SnO₂; ethanol; in-situ synthesis; interdigital electrode; microgas sensor; microhotplatform; micromachined hot platform; nanogas sensor; nanostructured porous film; platinum microheater; polystyrene sphere monolayer colloidal crystal template; porous nanofilm monolayer; power 25 mW; sensor detection limit; Ethanol; Films; Gas detectors; Heating; Sensitivity; SnO2; micro/nano gas sensor; microhotplatform; ordered porous nanofilm;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627205

Filename

6627205