Title :
Ultra high performance gas sensor based on IC compatible fusion of micromachined hotplatform and nanostructured porous film
Author :
Lei Xu ; Zhengfei Dai ; Tie Li ; Guotao Duan ; Weiping Cai ; Yuelin Wang
Author_Institution :
State Key Lab. of Transducer Technol., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
Ultra-high performances of low power, high sensitivity, and fast response was achieved in a novel micro/nano gas sensor that fused a microhotplatform (MHP) and a monolayer of ordered porous SnO2 nanofilm. Based on the MHP with a platinum microheater and interdigital electrode (IDE), a highly ordered SnO2 porous film was in-situ synthesized using a polystyrene sphere monolayer colloidal crystal template. Test results indicated that the sensor was sensitive to 100 ppb ethanol with a sensitivity of 1.6 (Rair/Rgas), a power consumption of 25 mW and a response time less than 2 s. The detection limit of the sensor was calculated as 9 ppb.
Keywords :
colloidal crystals; gas sensors; micromachining; microsensors; monolayers; nanoporous materials; nanosensors; platinum; polymers; semiconductor devices; sensor fusion; thin film sensors; tin compounds; IC compatible fusion; IDE; MHP; SnO2; ethanol; in-situ synthesis; interdigital electrode; microgas sensor; microhotplatform; micromachined hot platform; nanogas sensor; nanostructured porous film; platinum microheater; polystyrene sphere monolayer colloidal crystal template; porous nanofilm monolayer; power 25 mW; sensor detection limit; Ethanol; Films; Gas detectors; Heating; Sensitivity; SnO2; micro/nano gas sensor; microhotplatform; ordered porous nanofilm;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627205
