Title :
30 nm metallic slot array for sensing: Theoretical and experimental study
Author :
Qing Tan ; Cosentino, A. ; Roussey, Matthieu ; Herzig, H.P.
Author_Institution :
Opt. & Photonics Technol. Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Neuchatel, Switzerland
Abstract :
The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).
Keywords :
diffraction gratings; elemental semiconductors; integrated optics; optical arrays; optical fabrication; optical sensors; optical waveguides; refractive index measurement; silicon; Si; metallic slot array; metallic slot grating; refractive index unit; refractive index variation measurements; silicon waveguide; size 30 nm; size 500 nm; slot width; Arrays; Cavity resonators; Optical sensors; Optical surface waves; Optical waveguides; Refractive index; Subwavelength structure; nanostructure fabrication; sensors;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031099
