Nanoelectronics: towards end of scaling and beyond

Future trends are discussed of the semiconductor mainstream technology in the next 1 1/2-decade towards the "scaling end" of the ITRS Roadmap and beyond. While the physics, design, and manufacturing limitations of CMOS scaling will be indisputably strike in the foreseeable future, emerging nanotechnology may step in to promote continued advancement of chip technology in terms of performance, density, and cost, not through the well-established geometry scaling-down approach but based on ingenious concepts of new functional materials, device architectures, and large-scale fabrication