• DocumentCode
    3462291
  • Title

    Corrosion susceptibility of Al-Cu and Al-Cu-Si films

  • Author

    Lawrence, J.D. ; McPherson, J.W.

  • Author_Institution
    Texas Instrum. Inc., Dallas, TX, USA
  • fYear
    1991
  • fDate
    9-11 April 1991
  • Firstpage
    102
  • Lastpage
    106
  • Abstract
    The susceptibility to chlorine-induced corrosion of Al-Cu and Al-Cu-Si films has been measured. The adverse impact of Cu on the corrosion susceptibility of unsintered films is clearly evident at 0.3% and increases sharply between 1.0% and 2.0% with the latter being 6 times more corrosive than the former. Adding 1.0% Si to the Al-Cu (2%) alloys tends to lower the corrosion susceptibility of unannealed films by a factor of 9. This effect is shown to be caused by higher quality native aluminum oxide resulting in a delay in the onset of the corrosion rather than a slower rate once corrosion has begun. Annealing (30 min at 450 degrees C) the copper containing films also has a beneficial effect on corrosion susceptibility.<>
  • Keywords
    aluminium alloys; copper alloys; corrosion testing; metallisation; chlorine-induced corrosion; corrosion susceptibility; onset; unannealed films; Aluminum alloys; Annealing; Copper; Corrosion; Metallization; Packaging; Semiconductor films; Silicon alloys; Testing; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 1991, 29th Annual Proceedings., International
  • Conference_Location
    Las Vegas, NV, USA
  • Print_ISBN
    0-87942-680-2
  • Type

    conf

  • DOI
    10.1109/RELPHY.1991.145994
  • Filename
    145994