DocumentCode :
3462291
Title :
Corrosion susceptibility of Al-Cu and Al-Cu-Si films
Author :
Lawrence, J.D. ; McPherson, J.W.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fYear :
1991
fDate :
9-11 April 1991
Firstpage :
102
Lastpage :
106
Abstract :
The susceptibility to chlorine-induced corrosion of Al-Cu and Al-Cu-Si films has been measured. The adverse impact of Cu on the corrosion susceptibility of unsintered films is clearly evident at 0.3% and increases sharply between 1.0% and 2.0% with the latter being 6 times more corrosive than the former. Adding 1.0% Si to the Al-Cu (2%) alloys tends to lower the corrosion susceptibility of unannealed films by a factor of 9. This effect is shown to be caused by higher quality native aluminum oxide resulting in a delay in the onset of the corrosion rather than a slower rate once corrosion has begun. Annealing (30 min at 450 degrees C) the copper containing films also has a beneficial effect on corrosion susceptibility.<>
Keywords :
aluminium alloys; copper alloys; corrosion testing; metallisation; chlorine-induced corrosion; corrosion susceptibility; onset; unannealed films; Aluminum alloys; Annealing; Copper; Corrosion; Metallization; Packaging; Semiconductor films; Silicon alloys; Testing; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium, 1991, 29th Annual Proceedings., International
Conference_Location :
Las Vegas, NV, USA
Print_ISBN :
0-87942-680-2
Type :
conf
DOI :
10.1109/RELPHY.1991.145994
Filename :
145994
Link To Document :
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