Fabrication and biochemical sensing applications of controllable germanium nanowires array

As a typical semiconductor material, germanium has attracted significant interest as a good candidate to replace silicon for future-generation microelectronics, owing to its better electronic properties. In this work, we presented a new method to fabricate high-quality, controllable germanium nanowires (GeNWs) array by combining the electron beam lithography (EBL) and Ge-condensation technology. Through this method, well-ordered, SiO₂ coated, core-shell structure GeNWs array was obtained. Furthermore, based on the nanostructure, the GeNWs array was modified with silanization and the preliminary biochemical sensing applications including pH and DNA sensors were realized.