Production of 16 K pixel hydrogen ion image sensors with 0.01pH resolution

The high sensitive pH image sensor is required in biology and cytology field. In our previous work, highly sensitive pH sensor, which is capable to measure 0.01pH, with a Q-trap structure had been fabricated. However, two-dimensional array sensor couldn´t be realized due to large threshold voltage variability between each pixel. In this study, a multi ICG measurement method was proposed for ion image sensor with high pH sensitivity. The method was a measurement procedure to reduce the threshold voltage variability by controlling V_ICG at each pixel. A 16k pH image sensor with the Q-trap was fabricated. We successively took a ion image with small pH difference using multi ICG system.