Production of 16 K pixel hydrogen ion image sensors with 0.01pH resolution

Author

Otake, R. ; Futagawa, Masato ; Dasai, Fumihiro ; Suzuki, Daisuke ; Ishida, Makoto ; Sawada, Kazuaki

Author_Institution

Integrated Circuit & Sensor Syst. Group, Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

2153

Lastpage

2156

Abstract

The high sensitive pH image sensor is required in biology and cytology field. In our previous work, highly sensitive pH sensor, which is capable to measure 0.01pH, with a Q-trap structure had been fabricated. However, two-dimensional array sensor couldn´t be realized due to large threshold voltage variability between each pixel. In this study, a multi ICG measurement method was proposed for ion image sensor with high pH sensitivity. The method was a measurement procedure to reduce the threshold voltage variability by controlling V_ICG at each pixel. A 16k pH image sensor with the Q-trap was fabricated. We successively took a ion image with small pH difference using multi ICG system.

Keywords

chemical sensors; image resolution; image sensors; pH measurement; sensor arrays; 3D sensor array; Q-trap structure; biology field; cytology field; hydrogen ion image sensor; image resolution; multi ICG measurement method; pH image sensor; pH measurement; pH sensitivity; threshold voltage variability reduction; Arrays; Charge measurement; Hydrogen; Image resolution; Image sensors; Sensitivity; Threshold voltage; 16K pixels; charge accumulation; charge-transfer-type; multi ICG method; pH image;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627228

Filename

6627228