A novel MEMS electromagnetic energy harvester with series coils

Author

Zhong Liang Li ; Meng Di Han ; Hai Xia Zhang

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2013

fDate

16-20 June 2013

Firstpage

2245

Lastpage

2248

Abstract

A novel MEMS electromagnetic energy harvester with series coils was designed, fabricated and tested. The magnetic properties of permanent magnets were analyzed by MAXWELL and we enhanced magnetization through magnet arrays. An integrated method to fabricate permanent magnet was applied for fabrication, this MEMS compatible fabrication processes not only increased the production efficiency but also condensed the device´s volume to 2.72 mm³. The new structure with series coils improved the output voltage to 0.98 mV at resonant frequency 48 Hz and the power density can be 5.52 uW/cm³.

Keywords

coils; electromagnetic devices; energy harvesting; magnetisation; microfabrication; micromagnetics; permanent magnets; MAXWELL analysis; MEMS electromagnetic energy harvester; frequency 48 Hz; magnet arrays; magnetic properties; magnetization; permanent magnet fabrication; power density; production efficiency; series coils; Coils; Fabrication; Magnetic flux; Magnetic separation; Micromechanical devices; Permanent magnets; Vibrations; Electromagnetic energy harvester; MEMS compatible fabrication; magnetic properties; series coils;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627251

Filename

6627251