Title :
A novel MEMS electromagnetic energy harvester with series coils
Author :
Zhong Liang Li ; Meng Di Han ; Hai Xia Zhang
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
A novel MEMS electromagnetic energy harvester with series coils was designed, fabricated and tested. The magnetic properties of permanent magnets were analyzed by MAXWELL and we enhanced magnetization through magnet arrays. An integrated method to fabricate permanent magnet was applied for fabrication, this MEMS compatible fabrication processes not only increased the production efficiency but also condensed the device´s volume to 2.72 mm3. The new structure with series coils improved the output voltage to 0.98 mV at resonant frequency 48 Hz and the power density can be 5.52 uW/cm3.
Keywords :
coils; electromagnetic devices; energy harvesting; magnetisation; microfabrication; micromagnetics; permanent magnets; MAXWELL analysis; MEMS electromagnetic energy harvester; frequency 48 Hz; magnet arrays; magnetic properties; magnetization; permanent magnet fabrication; power density; production efficiency; series coils; Coils; Fabrication; Magnetic flux; Magnetic separation; Micromechanical devices; Permanent magnets; Vibrations; Electromagnetic energy harvester; MEMS compatible fabrication; magnetic properties; series coils;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627251
