Title :
Determination of leaky SAW propagation, reflection and coupling on LiTaO3
Author :
Rösler, U. ; Cohrs, D. ; Dietz, A. ; Fischerauer, G. ; Ruile, W. ; Russer, P. ; Weigel, R.
Author_Institution :
Siemens Matsushita Components, Munich, Germany
Abstract :
For the common LSAW cut 36°rotYX-LiTaO3 quantitative information about propagation, reflection and coupling has been theoretically determined with the Finite Element Method (FEM). The FEM results have been validated by both comparison with other theories and measurements. The electro-mechanical coupling coefficient k2 and its dependence on metallization height, aperture and number of electrodes has been evaluated by measurement campaigns. We found k 2 values between 6 and 9%
Keywords :
acoustic wave reflection; finite element analysis; lithium compounds; surface acoustic wave filters; surface acoustic waves; LSAW; LiTaO3; SAW coupling; SAW filters; SAW reflection; aperture; electro-mechanical coupling coefficient; finite element method; leaky SAW propagation; metallization height; Apertures; Eigenvalues and eigenfunctions; Finite element methods; Frequency measurement; Gratings; Phased arrays; Reflection; Strips; Surface acoustic waves; Surface waves;
Conference_Titel :
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-2940-6
DOI :
10.1109/ULTSYM.1995.495576
