• DocumentCode
    3462920
  • Title

    Determination of leaky SAW propagation, reflection and coupling on LiTaO3

  • Author

    Rösler, U. ; Cohrs, D. ; Dietz, A. ; Fischerauer, G. ; Ruile, W. ; Russer, P. ; Weigel, R.

  • Author_Institution
    Siemens Matsushita Components, Munich, Germany
  • Volume
    1
  • fYear
    1995
  • fDate
    7-10 Nov 1995
  • Firstpage
    247
  • Abstract
    For the common LSAW cut 36°rotYX-LiTaO3 quantitative information about propagation, reflection and coupling has been theoretically determined with the Finite Element Method (FEM). The FEM results have been validated by both comparison with other theories and measurements. The electro-mechanical coupling coefficient k2 and its dependence on metallization height, aperture and number of electrodes has been evaluated by measurement campaigns. We found k 2 values between 6 and 9%
  • Keywords
    acoustic wave reflection; finite element analysis; lithium compounds; surface acoustic wave filters; surface acoustic waves; LSAW; LiTaO3; SAW coupling; SAW filters; SAW reflection; aperture; electro-mechanical coupling coefficient; finite element method; leaky SAW propagation; metallization height; Apertures; Eigenvalues and eigenfunctions; Finite element methods; Frequency measurement; Gratings; Phased arrays; Reflection; Strips; Surface acoustic waves; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
  • Conference_Location
    Seattle, WA
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-2940-6
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1995.495576
  • Filename
    495576