Capacitive micromachined ultrasonic transducers for acoustic manipulation

Author

Mao, S.P. ; Zhong, K. ; Rochus, V. ; Severi, S. ; Nauwelaers, B. ; Tilmans, H.A.C. ; Rottenberg, X.

Author_Institution

Imec v.z.w., Leuven, Belgium

fYear

2015

fDate

21-25 June 2015

Firstpage

662

Lastpage

665

Abstract

This paper presents for the first time the single-beam acoustic manipulation of micro-particles using capacitive micromachined ultrasonic transducers (cMUTs). We demonstrate polydimethylsiloxane (PDMS) micro-particles trapping in water using a 1.8 MHz hexagonal cMUT annular array as test vehicle. FEM simulations show that PDMS particles can be trapped on the center axis of a single cMUT cell relying solely on natural focusing. Experimental results confirm these findings. To our best knowledge, it is the first time to realize a single-beam acoustic trapping of micro-particles using three-dimensional confinement. Besides, it establishes cMUTs as good candidates for acoustic manipulation offering large potential for highly miniaturized and complex acoustic tweezers.

Keywords

finite element analysis; micromachining; ultrasonic transducers; FEM simulation; PDMS microparticle trapping; PDMS particles; acoustic manipulation; capacitive micromachined ultrasonic transducers; complex acoustic tweezers; hexagonal cMUT annular array; natural focusing; polydimethylsiloxane microparticle trapping; single cMUT cell; single-beam acoustic manipulation; single-beam acoustic trapping; test vehicle; three-dimensional confInement; Acoustic arrays; Acoustics; Artificial intelligence; Electron tubes; Finite element analysis; Torque; Viscosity; PDMS micro-particles; acoustic manipulation; cMUT; single-beam acoustic trapping;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181010

Filename

7181010