DocumentCode
3463144
Title
A novel infrared detector using nonlinear vibration for high sensitivity
Author
Yamazaki, Tsutomu ; Ogawa, Shinichi ; Kumagai, Shinya ; Sasaki, Motoharu
Author_Institution
Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan
fYear
2013
fDate
16-20 June 2013
Firstpage
2313
Lastpage
2316
Abstract
A novel infrared detector that uses nonlinear oscillator is fabricated for achieving high sensitivity. Transducer of the infrared detection is a torsional oscillator consisted of bi-materials. When the incident infrared is absorbed by the torsional oscillator, the oscillator is bended due to the differences in thermal expansions. The bending hardens the spring constant of torsional oscillator to increase the resonant frequency. This is quite different from the conventional vibrational detector that bases on the decrease in the resonant frequency by the increase in the mass of oscillator.
Keywords
bending; infrared detectors; oscillators; thermal expansion; transducers; vibrations; bending; bimaterial; infrared absorption; infrared detector fabrication; nonlinear oscillator; nonlinear vibration; resonant frequency; spring constant; thermal expansion; torsional oscillator; transducer; vibrational detector; Detectors; Films; Gold; Oscillators; Resonant frequency; Silicon; Springs; Infrared Sensor; Nonlinear Vibration; Torsional Oscillator;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location
Barcelona
Type
conf
DOI
10.1109/Transducers.2013.6627268
Filename
6627268
Link To Document