• DocumentCode
    3463144
  • Title

    A novel infrared detector using nonlinear vibration for high sensitivity

  • Author

    Yamazaki, Tsutomu ; Ogawa, Shinichi ; Kumagai, Shinya ; Sasaki, Motoharu

  • Author_Institution
    Dept. of Adv. Sci. & Technol., Toyota Technol. Inst., Nagoya, Japan
  • fYear
    2013
  • fDate
    16-20 June 2013
  • Firstpage
    2313
  • Lastpage
    2316
  • Abstract
    A novel infrared detector that uses nonlinear oscillator is fabricated for achieving high sensitivity. Transducer of the infrared detection is a torsional oscillator consisted of bi-materials. When the incident infrared is absorbed by the torsional oscillator, the oscillator is bended due to the differences in thermal expansions. The bending hardens the spring constant of torsional oscillator to increase the resonant frequency. This is quite different from the conventional vibrational detector that bases on the decrease in the resonant frequency by the increase in the mass of oscillator.
  • Keywords
    bending; infrared detectors; oscillators; thermal expansion; transducers; vibrations; bending; bimaterial; infrared absorption; infrared detector fabrication; nonlinear oscillator; nonlinear vibration; resonant frequency; spring constant; thermal expansion; torsional oscillator; transducer; vibrational detector; Detectors; Films; Gold; Oscillators; Resonant frequency; Silicon; Springs; Infrared Sensor; Nonlinear Vibration; Torsional Oscillator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
  • Conference_Location
    Barcelona
  • Type

    conf

  • DOI
    10.1109/Transducers.2013.6627268
  • Filename
    6627268