A raster-output 2D MEMS scanner with an 8 × 4 mm mirror for an automotive time-of-flight image sensor

Author

Aoyagi, I. ; Hamaguchi, Kiyoshi ; Nonomura, Y. ; Akashi, T.

Author_Institution

Toyota Central R&D Labs., Inc., Nagakute, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

2321

Lastpage

2324

Abstract

We present a moving-magnet type raster-output 2D MEMS scanner with a large mirror. The mirror has resonance frequencies above 300 Hz to provide a high tolerance against automobile vibrations. To drive large mirrors, high driving torques are required. Electromagnets with tapered magnetic poles were used, which generated concentrated magnetic fields near a moving magnet. The fabricated MEMS scanner was 17×14×25 mm in size and achieved full mechanical rotation angles (FMRAs) of 10° in a non-resonance mode and 7° in a resonance mode.

Keywords

automotive electronics; electromagnetic actuators; electromagnets; image scanners; image sensors; magnetic sensors; microfabrication; micromirrors; microsensors; vibrations; FMRA; automobile vibration; automotive time of flight image sensor; concentrated magnetic field generation; electromagnet; electromagnetic actuator; full mechanical rotation angle; mirror; moving magnet type raster output 2D MEMS scanner fabrication; nonresonance mode; size 14 mm; size 17 mm; size 25 mm; size 4 mm; size 8 mm; tapered magnetic pole; Frequency measurement; Magnetic resonance; Micromechanical devices; Mirrors; Silicon; Torque; 2D MEMS scanner; electromagnetic actuation; moving-magnet-type; time-of-flight image sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627270

Filename

6627270