Title :
A 2D micromachined accelerometer
Author :
Ahmad, H. ; Al-Khalili, A.-J. ; Landsberger, L. ; Kahrizi, M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Concordia Univ., Montreal, Que., Canada
Abstract :
A surface micromachined 2-D accelerometer is designed and implemented in CMOS. The implementation requires the addition of three masking steps to a commercially available standard CMOS process. It has a ±100 g full range reading and better than 1% linearity within this range with a sensitivity of 0.5 mV/g. The signal detection circuitry is an on-chip switched capacitor charge transfer circuit operating on an internally generated 1 MHz four-phase non-overlapping clock
Keywords :
CMOS integrated circuits; accelerometers; micromachining; microsensors; switched capacitor networks; 1 MHz; 2D micromachined accelerometer; CMOS process; four-phase nonoverlapping clock; onchip SC charge transfer circuit; signal detection circuitry; surface micromachined accelerometer; switched capacitor charge transfer circuit; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Circuits; Costs; Force measurement; Force sensors; Mechanical sensors; Springs;
Conference_Titel :
Electronics, Circuits, and Systems, 1996. ICECS '96., Proceedings of the Third IEEE International Conference on
Conference_Location :
Rodos
Print_ISBN :
0-7803-3650-X
DOI :
10.1109/ICECS.1996.584532
