Title :
A novel inertial switch based on nonlinear-spring shock stop
Author :
Deng, K.F. ; Su, W.G. ; Li, Sinan ; Zhang, Y.T. ; Chen, George Z. ; Zhang, Wensheng ; Wan, Soon ; Li, Luoqing ; Jiang, S.B. ; Zheng, Haomian ; Xia, Wei
Author_Institution :
Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China
Abstract :
This paper reports a novel inertial micro-switch based on nonlinear-spring shock stop. Both the movable and fixed electrodes have a movable contact point and a cascade beam structure respectively. Those nonlinear-spring shock stops can reduce impact and contact bouncing effect. The switch was fabricated by bulk micromachining process and characterized by centrifuge and drop hammer test. The threshold accelerations are all within 15% of theoretical estimates while the average on-state resistance was less than 10 Ω. The contact time can reach maximum 450 μs and no bounce occurs under applied acceleration from 273 g to 960 g.
Keywords :
electrodes; inertial systems; micromachining; microswitches; bulk micromachining process; cascade beam structure; centrifuge and drop hammer test; fixed electrodes; inertial microswitch; movable contact point; movable electrodes; nonlinear-spring shock stop; Acceleration; Contacts; Electric shock; Electrodes; Fabrication; Silicon; Switches; Acceleration switch; Nonlinear-spring shock stop; cascade beam; contact time;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627285
