A novel inertial switch based on nonlinear-spring shock stop

Author

Deng, K.F. ; Su, W.G. ; Li, Sinan ; Zhang, Y.T. ; Chen, George Z. ; Zhang, Wensheng ; Wan, Soon ; Li, Luoqing ; Jiang, S.B. ; Zheng, Haomian ; Xia, Wei

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China

fYear

2013

fDate

16-20 June 2013

Firstpage

2381

Lastpage

2384

Abstract

This paper reports a novel inertial micro-switch based on nonlinear-spring shock stop. Both the movable and fixed electrodes have a movable contact point and a cascade beam structure respectively. Those nonlinear-spring shock stops can reduce impact and contact bouncing effect. The switch was fabricated by bulk micromachining process and characterized by centrifuge and drop hammer test. The threshold accelerations are all within 15% of theoretical estimates while the average on-state resistance was less than 10 Ω. The contact time can reach maximum 450 μs and no bounce occurs under applied acceleration from 273 g to 960 g.

Keywords

electrodes; inertial systems; micromachining; microswitches; bulk micromachining process; cascade beam structure; centrifuge and drop hammer test; fixed electrodes; inertial microswitch; movable contact point; movable electrodes; nonlinear-spring shock stop; Acceleration; Contacts; Electric shock; Electrodes; Fabrication; Silicon; Switches; Acceleration switch; Nonlinear-spring shock stop; cascade beam; contact time;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627285

Filename

6627285