Title :
Glow-discharge ion-sorption micropump for vacuum MEMS
Author :
Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Zawada, A. ; Dziuban, Jan A.
Author_Institution :
Wroclaw Univ. of Technol., Wrocław, Poland
Abstract :
A miniature ion-sorption magnetic-field-enhanced glow-discharge MEMS (Micro-Electro-Mechanical System) vacuum pump has been shown. The 12×20×3.4 mm3 micropump is made of silicon and glass. Fabrication process includes several typical deep micromachining procedures followed by multilayer sandwich anodic bonding sealing of machined parts. The pump, with dead volume of circa 0.08 cm3, is able to pump down 25 cm3 to 5×10-6 hPa (mbar) in several minutes. Preliminary tests have shown no significant degradation of the device at least for 3 hours of the continuous work.
Keywords :
glass; glow discharges; micromachining; micropumps; silicon; vacuum pumps; deep micromachining; glow-discharge ion-sorption micropump; microelectro-mechanical system vacuum pump; miniature ion-sorption magnetic-field-enhanced glow-discharge MEMS; multilayer sandwich anodic bonding sealing; vacuum MEMS; Anodes; Cathodes; Glass; Ions; Micromechanical devices; Micropumps; Silicon; MEMS; Vacuum; ion-sorption micropump;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627292
