DocumentCode
3463553
Title
Laser frequency trimming technology based on FBAR
Author
Shao, Jing-Yu ; Wang, De-Miao ; Dong, Shu-rong
Author_Institution
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou
fYear
2006
fDate
Oct. 2006
Firstpage
272
Lastpage
274
Abstract
Thin film bulk acoustic resonators (FBAR) can be integrated in RFIC as an excellent RF and MF filter. Aimed at high frequency precision FBAR, a new method of evaporating the electrode layer of FBAR by laser is provided to trim FBAR resonant frequency. The experiment results confirm the feasibility of this method and show with a trimming precision up to 0.06%. Obvious frequency float was not detected. This laser trimming method for FBAR was not reported till now
Keywords
acoustic resonators; bulk acoustic wave devices; laser beam machining; thin film devices; FBAR resonant frequency; MF filter; RF filter; RFIC; electrode layer; laser frequency trimming technology; thin film bulk acoustic resonators; Electrodes; Film bulk acoustic resonators; Laser feedback; Quantum cascade lasers; Radio frequency; Resonant frequency; Rough surfaces; Surface emitting lasers; Surface roughness; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location
Shanghai
Print_ISBN
1-4244-0160-7
Electronic_ISBN
1-4244-0161-5
Type
conf
DOI
10.1109/ICSICT.2006.306204
Filename
4098083
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