• DocumentCode
    3463703
  • Title

    SAW gas detection using uncommon delay lines

  • Author

    Anisimkin, V.I. ; Penza, M. ; Kotelyanskii, I.M. ; Vasanelli, L.

  • Author_Institution
    IRE-RAS, Moscow, Russia
  • Volume
    1
  • fYear
    1995
  • fDate
    7-10 Nov 1995
  • Firstpage
    485
  • Abstract
    SAW delay lines with three different geometries are experimentally investigated as gas detectors and suggested for sensing of corrosive analytes. The main feature of these geometries is the complete separation between electromechanical transducers and sorbent film deposited on the opposite sides of substrate Experiments are accomplished at room temperature and atmospheric pressure with delay lines implemented on glass, quartz and Bi12SiO20 substrates and operating at frequencies 28-263 MHz. Pt film and H2 exposure are exploited as an example to demonstrate applicability of the proposed geometries as gas detectors. Comparison between the uncommon and common delay lines as gas sensors shows approximately the same gas sensitivity (50 ppm at 0.1% Hz), but higher insertion loss for uncommon devices. Achievable limits of the losses are discussed. Gas responses for SAW delay lines with different geometries, materials and wrap-around transits are presented
  • Keywords
    gas sensors; glass; losses; quartz; sensitivity; surface acoustic wave delay lines; surface acoustic wave sensors; 28 to 263 MHz; Bi12SiO20; Bi12SiO20 substrate; H2; H2 exposure; Pt; Pt film; SAW delay lines; SAW gas detection; SiO2; corrosive analytes; delay line geometries; electromechanical transducers; gas sensitivity; glass substrate; insertion loss; quartz substrate; sorbent film; wrap-around transits; Bismuth; Delay lines; Frequency; Gas detectors; Geometry; Glass; Substrates; Surface acoustic waves; Temperature sensors; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
  • Conference_Location
    Seattle, WA
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-2940-6
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1995.495625
  • Filename
    495625