DocumentCode
3463703
Title
SAW gas detection using uncommon delay lines
Author
Anisimkin, V.I. ; Penza, M. ; Kotelyanskii, I.M. ; Vasanelli, L.
Author_Institution
IRE-RAS, Moscow, Russia
Volume
1
fYear
1995
fDate
7-10 Nov 1995
Firstpage
485
Abstract
SAW delay lines with three different geometries are experimentally investigated as gas detectors and suggested for sensing of corrosive analytes. The main feature of these geometries is the complete separation between electromechanical transducers and sorbent film deposited on the opposite sides of substrate Experiments are accomplished at room temperature and atmospheric pressure with delay lines implemented on glass, quartz and Bi12SiO20 substrates and operating at frequencies 28-263 MHz. Pt film and H2 exposure are exploited as an example to demonstrate applicability of the proposed geometries as gas detectors. Comparison between the uncommon and common delay lines as gas sensors shows approximately the same gas sensitivity (50 ppm at 0.1% Hz), but higher insertion loss for uncommon devices. Achievable limits of the losses are discussed. Gas responses for SAW delay lines with different geometries, materials and wrap-around transits are presented
Keywords
gas sensors; glass; losses; quartz; sensitivity; surface acoustic wave delay lines; surface acoustic wave sensors; 28 to 263 MHz; Bi12SiO20; Bi12SiO20 substrate; H2; H2 exposure; Pt; Pt film; SAW delay lines; SAW gas detection; SiO2; corrosive analytes; delay line geometries; electromechanical transducers; gas sensitivity; glass substrate; insertion loss; quartz substrate; sorbent film; wrap-around transits; Bismuth; Delay lines; Frequency; Gas detectors; Geometry; Glass; Substrates; Surface acoustic waves; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location
Seattle, WA
ISSN
1051-0117
Print_ISBN
0-7803-2940-6
Type
conf
DOI
10.1109/ULTSYM.1995.495625
Filename
495625
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