Title :
Effect Of Cl Incorporation On The Performance Of Amorphous Silicon Thin Film Transistor
Author :
Jong Hyun Choi ; Chang Soo Kim ; Sung Ki Kim ; Jin Jang
Keywords :
Amorphous silicon; Hydrogen; Leakage current; Lighting; Optical films; Photoconductivity; Plasma temperature; Semiconductor films; Thin film transistors;
Conference_Titel :
Information Display, 1997., Proceedings of the Fourth Asian Symposium on
Conference_Location :
Hong Kong, China
Print_ISBN :
962-8273-01-9
DOI :
10.1109/ASID.1997.631446
