Experimental study on the impact of anchor losses on the quality factor of contour mode AlN resonators

Author

Segovia-Fernandez, Jeronimo ; Cremonesi, Massimiliano ; Cassella, Cristian ; Frangi, Alejandro ; Piazza, Gianluca

Author_Institution

Carnegie Mellon Univ., Pittsburgh, PA, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

2473

Lastpage

2476

Abstract

This paper presents an experimental study on the impact of anchor losses on the quality factor (Q) of laterally vibrating AlN contour mode resonators for three different resonance frequency devices (220 MHz, 370 MHz, and 1.05 GHz). Anchors of different width (W_a) and length (L_a) were designed as supports for resonators having a vibrating body of identical dimensions. The results confirm that the main source of damping is associated with anchor losses at 220 MHz and interfacial losses at 1.05 GHz. Furthermore, finite element analysis (FEA) was used to model anchor losses in AlN CMRs, exhibiting excellent agreement with the measurements.

Keywords

III-V semiconductors; Q-factor; aluminium compounds; damping; finite element analysis; micromechanical resonators; piezoelectric transducers; vibrations; wide band gap semiconductors; AlN; CMR; FEA; anchor loss impact; damping; finite element analysis; frequency 1.05 GHz; frequency 220 MHz; frequency 370 MHz; interfacial losses; laterally vibrating AlN contour mode resonators; quality factor; resonance frequency devices; vibrating body; Damping; Electrodes; Finite element analysis; III-V semiconductor materials; Micromechanical devices; Q-factor; Resonant frequency; AlN contour mode resonator; anchor losses; finite element analysis; interfacial losses; quality factor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627307

Filename

6627307