Analysis of the different contributions to the response of SAW gas sensors

Author

Anisimkin, V.I. ; Kotelyanskii, I.M. ; Fedosov, V.I. ; Caliendo, C. ; Verardi, P. ; Verona, E.

Author_Institution

Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia

Volume

1

fYear

1995

fDate

7-10 Nov 1995

Firstpage

515

Abstract

Numerical estimations of the mass and elastic loadings are performed for different possible material combinations. In order to do this, the density and elastic constants of the film are changed consequently and one by one for each of the combination selected in accordance with Farnell-Adler´s theory. In addition, the perturbation approach is applied to analyse the SAW gas response in analytical form. On considering, as an example, Pd coated SAW delay lines exposed to hydrogen, the relative changes in Pd parameters are measured, the mass and elastic loadings are estimated and the SAW hydrogen responses are theoretically predicted and experimentally verified. An increase of a factor 10 in the SAW gas response is demonstrated for Pd film deposited on different substrate materials and/or crystallographic orientations

Keywords

elastic constants; gas sensors; perturbation techniques; surface acoustic wave delay lines; surface acoustic wave sensors; Farnell-Adler theory; H₂; Pd; Pd coated SAW delay lines; Pd film; SAW gas response; SAW gas sensors; crystallographic orientations; elastic constants; elastic loading; film density; mass loading; perturbation approach; substrate materials; Conductive films; Crystalline materials; Crystallography; Delay estimation; Delay lines; Gas detectors; Hydrogen; Phase change materials; Substrates; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE

Conference_Location

Seattle, WA

ISSN

1051-0117

Print_ISBN

0-7803-2940-6

Type

conf

DOI

10.1109/ULTSYM.1995.495630

Filename

495630