Title :
Miniature Fourier transform infrared spectrometer for middle infrared wavelength range
Author :
Tanahashi, Toshiyuki ; Toda, Masayoshi ; Miyashita, Hiroaki ; Ono, Takahito
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
A miniature Fourier transform infrared spectrometer (FTIR) is designed and fabricated. The spectrometer consists of an electrostatically-driven Si wishbone interferometer (size: 8 × 8 mm2), Si capacitive displacement sensor, light source with an aperture, and detector. Three-dimensional Si micromirror is assembled on the interferometer. The miniature FTIR operates in mid-infrared range, and multi gas detection including CO2 and water has been demonstrated using this miniaturized FTIR.
Keywords :
Fourier transform spectrometers; assembling; capacitive sensors; displacement measurement; elemental semiconductors; gas sensors; infrared detectors; infrared spectrometers; light interferometers; microfabrication; micromirrors; microsensors; silicon; FTIR; Si; assembling; capacitive displacement sensor; electrostatically-driven wishbone interferometer; light aperture source; middle infrared wavelength range; miniature Fourier transform infrared spectrometer; multigas detection; three-dimensional micromirror; water; Electrostatic actuators; Fourier transforms; Mirrors; Optical interferometry; Optical sensors; Silicon; Miniature Fourier transform infrared spectrometer; micro corner cube mirror; micro-interferometer; multi gas detection;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627316
