A high performance MEMS based digital-output gyroscope

Author

Ismail, A. ; George, Boby ; Elmallah, A. ; Mokhtar, A. ; Abdelazim, M. ; Elmala, M. ; Elshennawy, Amr ; Omar, Ankur ; Saeed, Maryam ; Mostafa, I. ; ElSayed, Ahmed

Author_Institution

Si-ware Syst., Cairo, Egypt

fYear

2013

fDate

16-20 June 2013

Firstpage

2523

Lastpage

2526

Abstract

In this work, the architecture, and measurements results of an ultra-low noise closed-loop force feedback gyroscope, with superior bias instability, are presented. The MEMS is interfaced to a highly programmable capacitive interface ASIC, constructing a complete sensor module with a digital-output. Measurements results indicate the superior performance of the gyroscope, with a bias instability of 1°/hr, a noise floor of 1.3m/s/√Hz, and a full-scale range of ±300°/s, while consuming 25mA from a 5V supply.

Keywords

application specific integrated circuits; capacitive sensors; circuit stability; digital instrumentation; force feedback; gyroscopes; microsensors; ASIC; MEMS based digital output gyroscope; bias instability; closed loop force feedback gyroscope; current 25 mA; noise floor; programmable capacitive interface; sensor module; voltage 5 V; Application specific integrated circuits; Digital filters; Gyroscopes; Micromechanical devices; Noise; Resonator filters; Temperature measurement; Closed-loop sensors; Gyroscopes; electro-mechanical Σ-Δ; force-feedback; inertial sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627319

Filename

6627319