Title :
How materials innovations will lead to device revolution?
Author :
Fortunato, Elvira ; Martins, Rodrigo
Author_Institution :
Mater. Sci. Dept., UNINOVA, Caparica, Portugal
Abstract :
Transparent electronics has gained special attention during the last few years and is today established as one of the most promising technologies for leading the next generation of flat panel display due to its excellent electronic performance. The key components are wide band gap semiconductors, where oxides of different origin play an important role, not only as passive component but also as active component, similar to what we observe in conventional semiconductors like silicon. In this paper we present the recent progress in n- and p-type oxide based thin film transistors (TFT) produced by rf magnetron sputtering and we will summarize the major milestones already achieved with this emerging and very promising technology.
Keywords :
flat panel displays; silicon; sputter deposition; thin film transistors; wide band gap semiconductors; RF magnetron sputtering; Si; TFT; active component; device revolution; flat panel display; material innovations; n-type oxide; p-type oxide; passive component; silicon; thin film transistors; transparent electronics; wide band gap semiconductors; Annealing; Consumer electronics; Iron; Silicon; Sputtering; Temperature; Thin film transistors; Metal Oxide Thin Films; Thin Film Transistors; Transparent Electronics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181065