Title :
Dual-layer nanoporous anodic aluminum oxide with embedded electrodes for capacitive relative humidity sensor
Author :
Hsieh, Chia-Lin ; Lo, P.-H. ; Fang, Wanliang
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
This study reports an approach to implement a capacitive type relative-humidity sensor (RH sensor) with sensing electrodes embedded in dual-layer nanoporous anodic aluminum oxide (np-AAO). Based on the superior material properties of np-AAO, the dielectric constant change of np-AAO will lead sensing capacitance change after moisture absorbing. The present RH sensors has two merits, (1) dual-layer np-AAO will increase the area for moister absorbing, (2) the electric field of embedded sensing electrodes will pass through both top and bottom np-AAO layers to increase the sensing signals. Measurement results show that the sensitivity is improved for near 4-fold by the present design at the sensing range of 30%RH to 95%RH.
Keywords :
aluminium compounds; capacitance; capacitive sensors; electrodes; humidity sensors; moisture; nanoporous materials; permittivity; AlO; capacitive relative humidity sensor; dielectric constant; dual-layer nanoporous anodic aluminum oxide; electric field; embedded electrodes; moisture; sensitivity; Electrodes; Humidity; Moisture; Sensitivity; Temperature measurement; Temperature sensors; Nanoporous anodic aluminum oxide (np-AAO); capacitive sensor; relative humidity sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627331
