Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

Author

Kim, Min-Oh ; Lee, Kahyun ; Na, H. ; Kwon, D.-S. ; Choi, Jang-Young ; Lee, Jin-Il ; Baek, Dae-Hyun ; Kim, Jung-Ho

Author_Institution

Sch. of Mech. Eng., Yonsei Univ., Seoul, South Korea

fYear

2013

fDate

16-20 June 2013

Firstpage

2576

Lastpage

2579

Abstract

We developed a micro-chemo-mechanical hydrogen sensor with novel sensing mechanism based on contact resistance change of carbon nanotubes array. The sensor is composed of two facing sets of carbon nanotubes (CNT) arrays as the detection material and palladium (Pd)-coated micro-cantilever fabricated on silicon-on-insulator (SOI) wafer. The Pd-silicon bimorph responds toward various concentration of hydrogen gas at room temperature. This micro-chemo-mechanical sensor reacted to 0.5% of hydrogen gas within 12 seconds and showed detection limit as low as 0.05%. It is much lower value than typical resistive-type chemo-mechanical hydrogen sensors.

Keywords

cantilevers; carbon nanotubes; chemical sensors; coatings; contact resistance; elemental semiconductors; hydrogen; microfabrication; microsensors; nanofabrication; nanosensors; palladium; sensor arrays; silicon; silicon-on-insulator; C; CNT; H; Pd-Si; SOI wafer; carbon nanotube array; coating; contact resistance; hydrogen gas concentration; microcantilever; resistive-type microchemomechanical hydrogen sensor; silicon-on-insulator wafer; temperature 293 K to 298 K; time 12 s; Arrays; Carbon nanotubes; Contact resistance; Electrodes; Hydrogen; Resistance; Sensors; Low detection limit; carbon nanotubes array; chemo-mechanical; contact resistance; hydrogen sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627332

Filename

6627332