Facile fabrication of heterogeneous nanomaterial array towards low-power and multiplexed gas sensing application

We fabricated heterogeneous metal oxide nanomaterial array consisting of CuO nanospikes, ZnO nanowires, and TiO₂ nanotubes for multiplexed gas sensing. We developed selective synthesis and integration method for various nanomaterials in a small area by using a sequential combination of localized hydrothermal and liquid phase deposition methods. This method is low-cost and eco-friendly process because of its low reaction temperature, minimal usage of liquid precursor, and localized synthesis. The device shows good mechanical and electrical connection for gas sensing. The device is expected to be applicable for multiplexed gas sensing because of its high sensitivity by using nanomaterials, outstanding selectivity by using heterogeneous material array and low-power consumption by using small and highly integrated sensing materials.