NEMS integrated photonic system using nano-silicon-photonic circuits

Author

Dong, B. ; Cai, H. ; Tang, M. ; Gu, Y.D. ; Yang, Z.C. ; Jin, Y.F. ; Hao, Y.L. ; Kwong, D.L. ; Liu, A.Q.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2015

fDate

21-25 June 2015

Firstpage

997

Lastpage

1000

Abstract

This paper reports a NEMS integrated photonic system, which integrate tunable laser, optical cross correct and variable optical attenuators. The NEMS integrated photonic system is fabricated with nano-silicon-photonic fabrication technology to integrate various functions in a single silicon photonic circuit chip. The high light-confinement capability of the nano-silicon waveguides guarantees superior performance. The proposed NEMS integrated photonic system demonstrates large tuning range (45 nm), pure single-mode properties (45 dB side-mode-suppression ratio (SMSR)).

Keywords

elemental semiconductors; integrated optics; laser tuning; nanoelectromechanical devices; nanofabrication; nanophotonics; optical fabrication; optical waveguides; silicon; NEMS integrated photonic system; Si; light-confinement capability; nano-silicon waveguides; nano-silicon-photonic circuits; nano-silicon-photonic fabrication; optical cross correct; side-mode-suppression ratio; single silicon photonic circuit chip; single-mode properties; variable optical attenuators; Optical amplifiers; Optical attenuators; Optical device fabrication; Optical fibers; Optical ring resonators; NEMS; VOA; optical cross connect; photonic circuits; tunable laser;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181093

Filename

7181093