Top-down batch-fabricating bottom-up self-assembles for region-selective multi-functionalization of microfluidic chips

In this study, we propose and develop a novel technology to top-down batch-fabricate bottom up SAMs(self-assembled mono-layers) for sequentially patterning region-selective flow-guide surface-functionalizations of micro-flow chips. Using IC-like masked photolithographic process, different segments of micro-channel chips are surface-modified with different molecule-layers for designated fluidic properties, such as hydro(oleo)-phobicity, hydro(oleo)-philicity, or other bio/chemical functions like repellence of nonspecific bio-adsorption. By using this technology, wafer-level region-selective multiple modifications for microchannel-chips are experimentally implemented and the designated flow-guide and chemical-exaction functions are demonstrated.