3D reconstruction and feature extraction for analysis of nanostructures by SEM imaging

Author

Fu-Yun Zhu ; Qi-Qi Wang ; Xiao-Sheng Zhang ; Wei Hu ; Xin Zhao ; Hai-Xia Zhang

Author_Institution

Sci. & Technol. on Micro/Nano Fabrication Lab., Peking Univ., Beijing, China

fYear

2013

fDate

16-20 June 2013

Firstpage

2700

Lastpage

2703

Abstract

An efficient method for 3D reconstruction of nanostructures based on the SEM imaging principle is reported in this paper. By analyzing the contrast of one single top-view SEM image which contains all the surface information of visible structures, both the 3D morphology and shape parameters of nanostructures can be obtained. Thus it can provide more details of nanostructures and conduct subsequent computational analysis in their performance and applications, such as roughness measurement, optical simulation and properties optimizing, and so on. It becomes a convenient and practical tool to observe nanostructures quantitatively as well as qualitatively.

Keywords

feature extraction; image reconstruction; nanostructured materials; scanning electron microscopy; 3D morphology; 3D reconstruction; SEM imaging; computational analysis; feature extraction; nanostructure analysis; shape parameter; single top view SEM image; Image reconstruction; Nanostructures; Reflectivity; Scanning electron microscopy; Silicon; Surface morphology; Three-dimensional displays; 3D reconstruction; SEM imaging principle; feature extraction; nanostructures; properties optimizing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627363

Filename

6627363