Large range multi-axis fingertip force sensor

Author

Brookhuis, R.A. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Ma, Kwan-Liu ; Krijnen, G.J.M.

Author_Institution

MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands

fYear

2013

fDate

16-20 June 2013

Firstpage

2737

Lastpage

2740

Abstract

A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

Keywords

capacitive sensors; force measurement; force sensors; silicon; tactile sensors; Si; corrugated silicon ring; force sensitive area; in-plane guidance; large range multiaxis fingertip force sensor; miniature capacitive force sensor; normal force measurement; shear measurement; Capacitance; Electrodes; Force; Force measurement; Force sensors; Robot sensing systems; Silicon; Force sensor; capacitive; multi-axis; shear force; tactile;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627372

Filename

6627372